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X-ray Fluorescence Coating Thickness Tester COSMOS-3X


Small size and space saving
Ultra-small parts with excellent operability
Measure with the highest accuracy

・With double filter, it is possible to measure with the highest accuracy and optimum conditions
・Multitasking capability allows other processing, including reporting, even during measurement
・The minimum of the collimator is 0.05 & phi;mm

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Characteristic of X-ray Fluorescence Coating Thickness Tester COSMOS-3X

Double filter adopted

In addition to the numeric filter, the mechanical filter (double filter) can be used to measure under optimal conditions so as to always obtain the highest accuracy.

Full report preparation function

By adopting MS-Windows software, you can easily capture the measurement screen and have a full report creation function.MS-WindowsThe multitasking feature allows other processing, including reporting, even during measurement.

5 types of internal organs

The minimum diameter of the collimator is 0.1 mm and can measure very small parts.Standard・0.1,0.2,0.5,1.0,2.0
In addition, two special specifications are available as options.

Self-diagnosis function and X-ray tube maintenance function

Self-diagnosis function enables quick solution to equipment troubles.In addition, X-ray tube use time and durability time display function added to support maintenance safety.

Spectral display during film thickness measurement

Spectrum analysis with multi-channel High-speed processing enables simple operation and spectrum display of the object.(Processing speed about 2-3 seconds)

Display of measurement unit monitor image

Load the X-ray irradiation unit on the Windows screen and display the X-ray irradiation unit.The collimator makes it possible to change the magnification ratio.



About performance improvement (high accuracy) by Be window X-ray tube (option)


            We have prepared Be window X-ray tube (option) for X-ray fluorescence film thickness meter EX-731.
            By using this option, measurement accuracy can be greatly improved by repeating in Cr measurement and Ni measurement.


            Explanation on performance improvement


High energy (high atomic number) Sn measurements are equivalent, but low energy (low atomic)
In the case of the measurement of Cr and Ni, depending on the film thickness, it is more than 3 times with Cr and more than 2 times with Ni, depending on the film thickness.
You In the case of surface layer Au in the two-layer measurement, it is slight, but in the middle .
In the case of repeated measurement accuracy (standard deviation), the process of generating the fluorescent X-ray intensity obtained
due to statistical variations in the window, by applying Be window X-ray tube (optional) .
r Cr Standard machine It shows that about 9 times or more fluorescent X-ray intensity is obtained compared to
Therefore, measurement with the same accuracy as conventional becomes possible in a short time.
Please consider using this Be window X-ray tube.


Measurement screen

Measurement screen




Specification of X-ray fluorescence coating thickness tester COSMOS-3X

Type Manual stage
Measuring head Size(mm) 170 × 110
Amount of movement X(mm) 70
Y(mm) 70
Z(mm) 80
Measuring object height (maximum) 80
Size(mm) 402(W)×430(D)×580(H)
Weight(kg) 48
Sample weight(kg) 3
Computer Size(mm) Body 182(W)×383(D)×372(H)
/Monitor 412(W)×415(D)×432(H)
Weight(kg) Body 6.8 / Monitor 2.8
Printer Weight(kg) 3.4
Power supply AC100V±10V

Note: Specifications are subject to change without notice.

X-ray source Oil immersion type small microfocus X-ray tube
Target: tungsten
Tube voltage 50kV
Tube current variable
Irradiation method Top vertical irradiation method
Detector Proportional counter
Collimator 5 types (automatic switching type))
0.1, 0.2, 0.5, 1.0, 2.0φmm
:0.05×0.5,0.5×0.05,0.1, 0.2, 0.5φ
Sample observation CCD color camera
Computor PC/AT Compatible type
15 inch color monitor
Printer Inkjet printer
Measurement target Atomic number 22(Ti)~82(Pb)
Atomic number 21 or less can be measured by absorption method
filter 2 types(Co,Ni)Automatic switching
Measurable range Atomic number 22~24:0.02~about 20μm
Atomic number 25~40:0.01~about 30μm
Atomic number 41~51:0.02~about 70μm
Atomic number 52~82:0.05~about 10μm
Calibration curve Calibration curve automatic creation function
Multipoint calibration curve
Correction function Base correction
application Single layer plating measurement
2 layer plating measurement
3 layer plating measurement
Simultaneous measurement of alloy film thickness component ratio
Electrolytic nickel measurement
Measurement function Output format setting

Distance measurement between two points
Data processing function Statistics display: average, standard deviation, maximum, minimum, range, Cp, Cpk
Profile display
x-R control chart
Safety function X-ray power key switch
Fail safe function
Other features Password function
Equipment maintenance

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