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X-ray fluorescence coating thickness tester EX-851

X-ray fluorescence coating thickness tester EX-851

Equipped with auto focus
Select two measurement modes to make measurement work smoother

・Full auto focus mode
⇒Set the measurement object at the irradiation position of the laser pointer and close the door.
The stage moves automatically, and the measurement is automatically performed
・Semi-auto focus mode
⇒As with the above full auto focus mode, when the object is set
and the door is closed, the stage moves automatically and performs the action of focusing

Features of X-ray fluorescence coating thickness tester EX-851

Auto focus

Position the measuring unit to the position of the laser pointer, move it to the measured value automatically and measure only by closing the door.

Automatic measurement stage

By aligning the mouse to the measurement position, quick alignment is achieved.Also, if the measurement position is registered, continuous automatic measurement is also possible.In addition, coordinate correction, channel link, corresponding to various patterns.Standard board calibration can also be measured automatically.

Double filter adopted

In addition to the numeric filter, the mechanical filter (double filter) can be used to measure under optimal conditions so as to always obtain the highest accuracy.

Full report preparation function

By adopting MS-Windows software, you can easily capture the measurement screen and have a full report creation function.The multitasking feature allows other processing, including reporting, even during measurement.

5 types of internal organs

The minimum diameter of the collimator is 0.1 mm and can measure very small parts.Standard・0.1,0.2,0.5,1.0,2.0
In addition, two special specifications are available as options.

Self-diagnosis function and X-ray tube maintenance function

Self-diagnosis function enables quick solution to equipment troubles.In addition, X-ray tube use time and endurance time display function has been added to support maintenance safety.

Spectral display during film thickness measurement

Spectrum analysis high-speed processing by multi-channel, spectrum display of the object is performed by simple operation.(Processing speed about 2-3 seconds)

Display of measurement unit monitor image

Load the X-ray irradiation unit on the Windows screen and display the X-ray irradiation unit.The collimator makes it possible to change the magnification ratio.

Visually display the plating adhesion distribution of the object to be measured

Three-dimensional graph display makes it possible to understand the plating thickness distribution of the measurement object at a glance.



About performance improvement (high accuracy) by Be window X-ray tube (option)


We have prepared Be window X-ray tube (option) for X-ray fluorescence film thickness meter EX-731.
By using this option, it is possible to improve the measurement accuracy repeatedly for Cr measurement and Ni measurement.


Explanation on performance improvement


The high energy (high atomic number) Sn measurement is the same as before, but the low energy (low atomic number)
In the case of the surface layer Au in the two-layer measurement, the interlayer Ni is improved by about 20% due to the improvement of accuracy although it is small.n the case of the film thickness meter of the fluorescent X-ray method, the repeat measurement accuracy (standard deviation) is due to statistical fluctuation in the generation process of the obtained fluorescent X-ray intensity, and Be window X-ray tube (option) is applied These results indicate that, in the case of Cr, about 9 times or more fluorescent X-ray intensity is obtained compared to the conventional standard machine.Therefore, measurement with the same accuracy as conventional becomes possible in a short time.
Please consider using this Be window X-ray tube.


Measurement screen

Measurement screen

Automatic measurement position check

Automatic measurement position check



3D graph

3D graph

Specification of X-ray fluorescence coating thickness tester EX-851

Type Automatic stage
Measuring head Size(mm) 170 × 110
Amount of movement X(mm) 200
Y(mm) 200
Z(mm) 90
Measuring object height (maximum) 90
Size(mm) 685(W)×520(D)×685(H)
Weight(kg) 85
Sample load(kg) 5
Computer Size(mm) Body 182(W)×383(D)×372(H)
/Monitor 412(W)×415(D)×432(H)
Weight(kg) Body 6.8 / Monitor 2.8
Printer Weight(kg) 3.4
Power supply AC100V±10V

Note: Specifications are subject to change without notice.

X-ray source Oil immersion type small microfocus X-ray tube
Target: tungsten
Tube voltage 50kV
Tube current variable
Irradiation method Top vertical irradiation method
Detector Proportional counter
Collimator 5 types (automatic switching type)
0.1, 0.2, 0.5, 1.0, 2.0φmm
:0.05×0.5,0.5×0.05,0.1, 0.2, 0.5φ
Sample observation CCD color camera (auto focus)
Computer PC/AT Compatible type
17 inch color monitor
Printer Inkjet printer
Measurement target Atomic number 22(Ti)~82(Pb)
Atomic number 21 or less can be measured by absorption method
Filter 2 Types(Co,Ni)Automatic switching
Measurable range Atomic number 22~24:0.02~about 20μm
Atomic number 25~40:0.01~about 30μm
Atomic number 41~51:0.02~about 70μm
Atomic number 52~82:0.05~about 10μm
Calibration curve Calibration curve automatic creation function
Multipoint calibration curve
Correction function Base correction
Application Single layer plating measurement
2 layers plating measurement
3 layers plating measurement
Simultaneous measurement of alloy film thickness component ratio
Electroless nickel measurement
Measurement function Automatic measurement
Output format setting
Spectrum measurement
Distance measurement between two points
Automatic table function

auto focus
Measurement position specification(X-Y-Z)
Same pattern repeat function
Home point correction function
Measurement position confirmation function
Automatic calibration

Data processing function Statistics display: average, standard deviation, maximum, minimum, range, Cp, Cpk
Profile display
Measurement data three-dimensional display
x-Rcontrol chart
Safety function X-ray power key switch
Fail safe function
Other features Stage coordinate display
Password function
Equipment maintenance

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